1.Configuration
1） One KT-500 Diffusion Pump
2） One ZLD-300 Roots Pump
3） One 2X-70 Rotary vane Pump
4） One 2X-15 Maintaining Pump
5） One suit of ∮1000×1000 vacuum chambers
6） The rotation of work-piece adopts the frequency conversion speed regulator
7） Intelligent controlled by PLC (automatic controlling)
8） A computerized automatic gear-shifting vacuum gauge.
9） Three-way flow controller
10） One suit of contra-variant bias power and eight contra-variant arc power supply, ∮60&∮100 Arc Sources are all suitable(Quantity of arc sources can be increased)
11） Four side installed heating pipes
12） Computer PID controlled temperature
2.Character
The equipments and the wall of diffusion pump are made of stainless steel with wearable performance and high automatization, fit for plating single films and compound films membrane made of titanium nitrides, titanium carbide, zirconium nitrides, chromium nitride, titanium, nickel, chromium and copper etc, therefore it is your best choice for the surface decoration of hardware, tools, watches, plastics and sanitary wares. |
