1.Configuration
1）One KT-400 Diffusion Pump
2）One 2X-30 Rotary vane Pump
3）One 2X-15 Maintaining Pump
4）One suit of ∮800×800 vacuum chambers
5）The rotation of work-piece adopts the frequency conversion speed regulator
6）Intelligent controlled by PLC
7）Computer controlled auto ranging vacuum gauge
8）Three-way flux controller
9）One suit of contra-variant bias pressure and three-way contra-variant arc electric powers, ∮60&∮100 Arc Sources are all suitable
10）Computer PID controlled temperature
11）Four side installed heating pipes
1） With three-way Arc Source filtering system, it can filter out some large liquid
2） Various decorative coating for diamond.

2.Character
This equipment is a new fruit of Bite and Beijing Normal University; it adopts the contra-variant bias pressure and the arc source filtering system removes the liquid on it and it is automatically controlled.